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The The line/space pattern is parameterized with Yellow fields can have formulas that refer to variables. Variables can take on

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  • A 32nm line is simulated at five
  • Here we verify the optimal BARC thickness by looking at the resist profile. Minimizing the standing wave metric results in the best ...
  • Minus 2 plus 2 plus
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  • A python program is written to create data series that represent

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